• Proportional-valve stepless vacuum regulation formation technology
• Highly integrated design for double enhancement of equipment system efficiency and commissioning efficiency
• High-precision in temperature collection
• Automatic on-line calibration
• Anomaly detection (polarity / probe contact resistance / loop contact resistance / ambient temperature / channel temperature / smoke detection / power shut-off protection)
Items | Parameters |
Chamber Temperature Uniformity | ±3℃ |
| Discharge Efficiency | ≥75% |
| Charging Efficiency | ≥80% |
| On-site Commission Efficiency | increased by 30% |
